Advanced Microsystems for Automotive Applications 2005 by Prof. Dr. G. Färber (auth.), Dr. Jürgen Valldorf, Wolfgang

By Prof. Dr. G. Färber (auth.), Dr. Jürgen Valldorf, Wolfgang Gessner (eds.)

Since 1995 the yearly foreign discussion board on complicated Microsystems for car purposes (AMAA) has been held in Berlin. the development deals a different chance for microsystems part builders, procedure providers and vehicle brands to teach and to debate competing technological techniques of microsystems established strategies in vehicles.

The booklet accompanying the development has proven to be a good tool for the diffusion of latest innovations and know-how effects. the current quantity together with the papers of the AMAA 2005 supplies an outline at the state of the art and descriptions drawing close and mid-term R&D views. The 2005 ebook displays – as some time past – the present nation of discussions inside of undefined. greater than the former courses, the AMAA 2005 "goes again" to the technological standards and fundamental advancements for enjoyable the industry wishes. the massive a part of contributions facing sensors in addition to "sensor applied sciences and knowledge fusion" is exemplary for this tendency.

In this context a paradigm shift should be acknowledged. long ago the improvement concentrated predominantly at the detection and processing of unmarried parameters originating from unmarried sensors. this present day, the problem more and more is composed in getting info of advanced occasions with a chain of variables from diverse sensors and in comparing this knowledge. shrewdpermanent built-in units utilizing the data deriving from some of the sensor resources should be in a position to describe and examine a site visitors state of affairs or behaviour a lot quicker and extra trustworthy than a person could possibly do.

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Competition and quality will continue to increase, partially due to the setting up of shops of European and US suppliers in China. Successful automotive suppliers such as SAIC (Shanghai Automotive Industry Group Corporation) assume more and more responsibility for quality and out put while transitioning from contract manufacturer to fully developed supplier. 27 28 Introduction Fig. 3. Automotive joint-ventures in China [5] Just like for many of the emerging markets, looking at MST requirements for cars in China, one has to clearly make a distinction between European upper middle class and luxury cars (starting at VW Passat and above) which come fully equipped and the probably larger bulk of very low cost cars.

4. Car functions and the respective sensors (source: based on DaimlerChrysler) 31 32 Introduction Technical Requirements for Automotive Microsystems The use of microsystems as sensors typically requires close contact to the measured medium and often translates into harsh environment conditions for the sensor. Microsystems therefore have to withstand and function under almost all automotive conditions being present in a car. The following table gives a brief overview of such environments: Temperature challenges: unlike commonly assumed about 5 years back, most of the relevant future applications do not require operation of MST devices at temperatures beyond 180°C.

Matsushita also develops comb-drive accelerometers. Today, these accelerometers are at the feasibility stage). The production yield is in the range 70% to 80% for accelerometers and about 1800 accelerometers are manufactured on a 6’’ wafer with an average size of 8mm2. We estimate that 56% of accelerometers are surface micromachined and 44% of accelerometers are bulk micromachined. But, some players (such as Bosch, AD …) are using Deep RIE equipments in surface micromachining process in order to benefit from the high etching rate.

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